(英文)溅射原理和应用
47页1、Advanced Magnetron Sputtering Techniques: Principles and Applications,D. G. Teer Teer Coatings Ltd, UK,slide 2,Movchan & Demchisin,Coating Requirements,slide 3,Balzers 1980,First Successful Applications,TiN on cutting tools,slide 4,Original Ion Plating,Ion bombardment can replace the effect of temperature and provide enhanced diffusion (Mattox, 1963)AdhesionThrowing PowerDensification,Ion bombardment can replace the effect of temperature and provide enhanced diffusion (Mattox, 1963)AdhesionThrow
2、ing PowerDensification,slide 5,Requirements,Ion Energy - about 40 eVIon Current - high 1mA/cm2,_High Ion Energy and Low Ion Current will not produce good coatings.,slide 6,Ion Plating Characteristics,slide 7,Arc Ion Plating,Hollow Cathode EB(i) Gun,Low Voltage EB(i) Gun,Practical Ion Plating Systems,slide 8,Closed Field Unbalanced Magnetron,Conventional Magnetron,Unbalanced Magnetron,Evolution of Magnetron Sputtering Techniques,slide 9,Increased Ion Current,slide 10,Ion Current Characteristics,s
3、lide 11,Flexibility Compounds Alloys Graded Coatings Multi-Layer Coatings,StabilityRepeatabilityUniformityLow Temperature,Flexibility Compounds Alloys Graded Coatings Multi-Layer Coatings,Main Advantages of CFUBMSIP,StabilityRepeatabilityUniformityLow Temperature,slide 12,CFUBMSIP,Conventional Magnetron,Bright,Finger print,Dense structure,Columnar structure,Comparison of TiN Coating Properties,Good Adhesion,Poor adhesion,slide 13,CrTiAlNDymon-iC (DLC-C:H)Graphit-iC (C/Cr)MoSTTM (MoS2/Ti),CrTiAlN
4、Dymon-iC (DLC-C:H)Graphit-iC (C/Cr)MoSTTM (MoS2/Ti),New CFUBMSIP-Derived Coatings,slide 14,Coating Deposition CFUBMSIP 1 Ti, 1 Al, 2 Cr Ar N2 OEM control loop,CrTiAlN Deposition Process,Coating Deposition CFUBMSIP 1 Ti, 1 Al, 2 Cr Ar N2 OEM control loop,slide 15,CrTiAlN Coating Sequence,Substrate (AISI M42 grade HSS, 1200 grit finish) 0.2 m Cr bonding layer 0.3 m CrTiAlN graded layer 4 m nanoscale CrTiAlN multilayer, 10nm 30 GPa Good Adhesion Lc 60 N, HF 1 Good Wear Resistance No detectable wear
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