超声波扫描显微镜.ppt

SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING超声波扫描显微镜 Scanning Acoustic MicroscopeSonoscan D9500SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING1. 超声波基础知识2.超声波扫描微成像工作原理3. 超声检测设备的参数和软件介绍4. 超声波成像应用举例5.超声波检测和X射线检测SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING1、超声波基础知识SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERINGULF 超声的应用：清洗, 焊接, 治疗, 成像和传感超声波清洗和焊接：20KHz~40KHz超声波成像：>5MHzBasics of Ultrasound (超声波基础)SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING• Ultrasound is an elastic disturbance that propagates through materials(mainly solids and liquids) at frequencies above 20 KHz.(超声波的频率在20KHz以上，人不能听到)• An ultrasonic wave cannot propagate through a vacuum at any frequencyor through air at frequencies above 10 MHz.(任何频率超声波都不能穿透真空。

当超声波频率大于10MHz时，也不能穿透空气)• The pressures generated at the focal spot are in the micro Joule rangeand are not harmful to even moderately delicate samples. • The pulse in the acoustic microscope has very low energy in comparison. (C-SAM使用的超声波的频率和能量不会对人体和样品有害)Basics of Ultrasound (超声波基 础)SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERINGUltrasound at Interfaces (界面处的超声波)• When an ultrasound pulse impinges on an interface, part of the energyis reflected and part transmitted.(在界面处的超声波，有些会被反射，有些会穿过该界面。

)• The relative strength of the transmitted (T) and reflected (R) ultrasoundat an interface is governed by the acoustic impedance of the materialson each side of the interface.(在界面处超声波反射和穿过的相对强度是由界面两边物质的声阻抗决定的)• Acoustic Impedance (Z) - the product of the density of the materialand the velocity of ultrasound (Z =V).(声阻抗是物质的密度和超声波在该物质中的传播速度的乘积)SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING1Material 2Transmitted wave (穿透波)Reflected wave (反射波)Reflection Coefficient (R) (反射系数R)Transmission Coefficient (T) (穿透系数T)Ultrasound at Interfaces (界面处的超声波)Z 1Z 2SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERINGAcoustic Impedance of Materials (声阻抗值)• Acoustic Impedance (Z) - is the product of a materials density times its ultrasonic velocity Z =  V• In practical terms - Acoustic Impedance is a materials characteristic property that determines the amount of reflected and transmitted energy that occurs when an ultrasonic wave encounters a boundary or interface between two materials.SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING5 MHz15 MHz30 MHz50 MHz75 MHz100 MHz150 MHz230 MHz300 MHzLow Frequency Greater PenetrationHigh Frequency Higher ResolutionSample Back SurfaceSample SurfaceFrequency, Resolution and Penetration (频率、分辨率和穿透力)SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING1Si Metallization10 MHz100 MHz1 GHzFlip Chips Wafer BondingBGAsThick Film AdhesionThin FilmsPlastic ICsCSPPorosity 电极封装、焊接内部结构的分层缺陷、杂质、裂纹等Mid Frequency (50-75 MHz): BGAs, die attach, die top: 中频探头 (50MHz – 75MHz): delaminations, defects, cracks;BGA, 粘晶芯片内部的分层缺陷、杂质、裂纹等；High Frequency (100-300 MHz): Delaminations, voids, defects, cracks in thin plastic 高频探头 (100MHz – 230MHz): packages and flip chips;薄型塑封器件、倒装焊芯片内部的分层缺陷、杂质、裂纹等；Ultra High Frequency (0.4-2 GHz): Nano-voids, cells, defects, boundaries in ceramics 超高频探头 (400MHz – 2GHz): alloys material;陶瓷，合金材料中的纳米空洞、颗粒、缺陷、界面;SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERINGTypical Parameter C-SAM Transducers 典型超声波传感器探头参数SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERINGSonoscan Software for Acoustic Microscope Sonoscan超声波扫描显微镜软件功能• Operation Software操作软件基于Windows XP• Easy Opertion便于操作的人性化设计• Image Analyser具有图象分析功能SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERINGLocate the VHR Visual Acoustics icon on the Microsoft Windows™ Desktop and double- click on this VHR Visual Acoustics icon 双击电脑桌面的VHR软件图标，打开软件。

VHR Software Logon VHR软件登录VHR Visual Acoustics Start-up VHR软件启动SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERINGVHR Software GUI VHR软件界面SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERINGTransducers Selection 探头选择和参数设定SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERINGParameter and Scaning Set-up 探头移动和扫描参数设定SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERINGRF Interface and Scan Mode Set-up RF界面和扫描模式参数设定SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERINGRF Image Set-up RF图像和设定SKLMS 机械制造系统工程国家重点实验室STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERINGC-SAM D9500 Series◆ Fast Scan Speed (快速扫描) ◆ Production screening, QA, Failure Analysis and processcontrol (适用于产品线,QA,失效分析和制程控制) ◆ User-selectable transducersfor superior image andresolution (更清晰和更高分辨率图像的可选择探头) ◆ Waterfall transduce。