电镀均匀性测试报告.docx

SUB：图形电镀5#铜缸均匀性测试报告TO ：CC ：From：审核：批准：日期： 文件类別 编号：生产、品质2020-05-1020200510001一、目的:按作业指引，定期测试均匀性能力是否满足我司品质要求测试步骤及方法1、试板规格：板厚1.5mm，底铜厚度H/HOZ,规格610mmX520mm2、 试板流程：开料一电铜一烘干一数据测量3、 电镀参数：试板线别缸号药水参数分析值温度电镀参数备注图电线5号缸CUSO :50-90g/L471.5g/L23°C1.8ASDX60min摇摆、打气、振动正常H SO :180-220g/L2 2203.4g/LCL-:40-80ppm63.5ppm三、挂板方式：+J斗1+J4-14-1*F2F%PRP6pP7pp%四、测试点示意图（测试点离板边 10mm）12 3 4 5 6 7 8ABCDEFGHIJ图电5#铜缸均匀性测试数据5T0.xis五、板面均匀性测试（每面测试 80点）1、详细测试数据见附件2、数据分析P1P2P3P4P5P6P7P8整体均匀性AVE24.8324.1523.7824.5424.1524.0524.3124.5224.29止面SDEV1.411.341.561.571.572.022.091.681.69COV5.68%5.57%6.58%6.40%6.48%8.40%8.59%6.84%6.97%反面MAX28.0026.1026.1027.0026.6027.0027.2027.7028.00MIN20.1020.9020.2020.9020.1020.2020.3020.0020.00极差7.905.205.906.106.506.806.907.708.00AVE25.4625.5525.0724.7624.3524.0323.9523.8224.62SDEV1.702.152.151.942.062.052.011.472.05COV6.67%8.40%8.56%7.82%8.46%8.54%8.38%6.19%8.31%MAX28.0028.6028.2027.9027.3027.0027.0027.5028.60MIN20.7020.0020.8020.2020.2020.2020.0020.5020.00极差7.308.607.407.707.106.807.007.008.60注：Cov = SDEVFAVE*100% （要求 <10%）3、图示分析：正面面铜铜厚分布圈—immh-cn—icnLDh-cn—inLDh-Qi—«co i-i-i-i-i-ii-ii-iodododrjojcn cncncnmF'tr'o-hhLDLDLDgggg□32.0 -35.0□ 29. 0 -32. 0□26.0 -29.0□23.0 -2&.0■20.0 -23.0□1T. 0 -20. 0ZE面面铜欖向铜厚分布图35.0032.002S.0026.0023.0020.001 4 7 10 13 16 19 22 25 28 31 34 37 40 43 46 49 52 55 58 61 64反面面丽丽厚分布图□32.a-35. 0□29.a-32. □■2S.a-29. □□23.a-26. 0□20.0-23. 0□17.0-20. 035.0032.0029.0026.00反面面铜横向铜厚分布图 5、23.0020.0011117 2 V-~厂、厂Illi 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Illi 1 1 1 1 1 1 Illi 1 1 1 1 1 1 1 1 1 1 1 1 1 1.47 10 13 1& 19 22 25 28 31 34 37 40 43 4& 49 52 55 58 61 64六、结论从测试板测量数据看整靶COV正面6.97%,反面8.31%，符合我司要求W10%。