半导体厂废水来源及处理介绍精选PPT.pptx

1Wastewater Treatment System of CISEMICISEMI废水处理系统1期简介ppt课件.2Newlvit 04/08/20122Contentu Waste Water System Waste Codes in China Wastewater Effluent Standard Waste Classification Waste Definition Wastewater System Flow Waste Chemical Collection Chemical Dosing System Waste Tank Material & List Waste Photoresist Lifting station Layout Waste Water Lifting Station Wastewater Treatment Layoutppt课件.3Newlvit 04/08/20123Waste Codes in Chinau中华人民共和国水污染防治法 (水) 中华人民共和国国家标准 地面水环境质量标准 中华人民共和国国家标准 地下水环境质量标准 污水综合排放标准GB 8978-2002之第三级标准 其中氨氮实行二级标准 污水处理设施环境保护监督管理办法 污水排入城市下水道水质标准 ppt课件.4Newlvit 04/08/20124Waste Codes in Chinau国家危险废物名录 HW06有机溶剂废物：废催化剂； 清洗剥离物、反应残渣 及滤 物与载体废物 感光材料废物：废显影液定影液、正负胶片、相纸及药品 表面处理废物：废电镀溶液、镀槽淤渣、电镀水处理污泥、处理酸碱渣、氧化槽渣、磷化渣 HW22含铜废物 HW24含砷废物 HW31含铅废物 HW32无机氟化物废物：氢氟酸不包括氟化钙 HW34废酸：废硫酸、硝酸、 磷酸 HW35废碱：NaOH、KOH HW42废有机计溶剂：异丙醇、丙酮、环戊酮、二甲苯ppt课件.5Newlvit 04/08/20125Wastewater Effluent Standard项目单位验收标准三级标准备注pH696-9CODppm350500SSppm250400F-ppm1520NH4-Nppm25按二级标准25其他水质项目亦须符合GB 8978-2002 污水综合排放标准之第三级标准。

ppt课件.6Newlvit 04/08/20126Waste ClassificationWastewaterFrom FabDr-RECDr-DHFGeneral Acid/CausticWastewaterDr-GWDr-HPMDr-APMFluorideWastewaterDr-MHFDr-HHFDr-CMP-MDr-CMP-OAcidWastewaterDr-H2SO4Dr-H3PO4SolventWastewaterDr-Sol.Dr-IPAPhoto ResistWastewaterDr-PR-PDr-FLDr-ESDr-H2SO4+HFDr-CMP-IDr-L/SDr-PR-NReclaimWastewaterCMPWastewaterDr-CMP-Pppt课件.7Newlvit 04/08/20127Waste ClassificationDI Water PlantDr-CAREGDr-MGREGHVACChemicalRoomDr-C/SDr-CTBWDr-GWDr-MHFDr-H2SO4Dr-Sol.Dr-HPMDr-H3PO4To FWWTo GWWTo GWWTo GWWWastewaterFrom Facilityppt课件.8Newlvit 04/08/20128Drainage Classification For Chemical RoomGroup NameRoom NameEquipmentWaterDrainRemarkDI/CWDRG/CHCl roomHCl CDSDIDR-HPMAcid room-11%HF CDSDIDR-MHF49%HF CDSPoly(I) CDSPoly(II) CDSH3PO4 CDSDR-H3PO4HNO3 CDSDR-GW/MHFAcid room-2BHF7:1 CDSDIDR-MHFBHF40:1 CDSBHF400:1 CDSCaustic roomDev#1 CDSDIDR-GWDev#2 CDS29%NH4OH CDS0.5%NH4OH CDSppt课件.9Newlvit 04/08/20129Group NameRoom NameEquipmentWaterDrainRemarkDI/CWDRSolvent roomIPA CDSNADR-Sol防爆IPA storage tankRinse#1 CDSRinse#1 storage tankACT-935 CDSEG CDSDev#3 CDSH2SO4 roomH2SO4 CDSDIDR-H2SO4H2SO4 storage tankH2O2 roomH2O2 CDSDIDR-GWH2O2 storage tankDev storage roomDev#1 storage tankDIDR-GWDev#1 storage tankDrainage Classification For Chemical Roomppt课件.10Newlvit 04/08/201210Waste Definitionu Definition of liquid waste in wastewater treatment - 1 Dr-GW, Dr-HPM & Dr-APM (General Waste) Quick Dump Rinse step of chemical bath drain (APM, HPM, SPM excluding for HF), Others (Including SO4-2, PO4-3 & Organic Solvent), Resistance 2M-cm. Dr-FL Floor drain. Dr-ES Emergency shower. Dr-HHF 49%, Fluoride contain chemical drain. Dr-MHF Less than 49%, Fluoride contain chemical drain. Dr-DHF Quick Dump Rinse Fluoride contain chemical drain. Dr-CMP-M Contain Metal slurry of CMP & wafer scrubber drain. Dr-CMP-O Contain Oxide slurry of CMP & wafer scrubber drain.ppt课件.11Newlvit 04/08/201211Waste Definitionu Definition of liquid waste in wastewater treatment - 2 Dr-CMP-P Contain Poly slurry of CMP & wafer scrubber drain. Dr-CMP-I CMP Idling water drain. Dr-H2SO4 SPM Drain. Dr-H3PO4 H3PO4 Drain. Dr-H2SO4+HF Sulfuric acid + Hydrofluoric acid Drain. Dr-Solvent Organic solvent Drain. Dr-IPA IPA Drain. Dr-ACT-935 ACT 935 Drain. Dr-PRP & Dr-PRN Photo resistance drain.ppt课件.12Newlvit 04/08/201212Waste Definitionu Definition of liquid waste in wastewater treatment -3 Dr-L/S Local Scrubber drainage and blow down. Dr-C/S Central Scrubber drainage and blow down. Dr-CAREG C/A Regeneration water. Dr-MGREG MGR Regeneration water. Dr-CTBW Cooling Tower drainage and blow down.ppt课件.13Newlvit 04/08/201213HF Treatment System FlowHF Collection Tank 30 M3Dr-DHFDHFLifting Tank20 M3 Dr-HHFHHFLifting Tank20 M3 Dr-CMPCMPCollection Tank10 M3 From EMPFrom SLCTFrom SLFPFrom WWSUPAir BlowerTo HFWRTppt课件.14Newlvit 04/08/201214HF Treatment System FlowNaOH HFWReactionTank210 M3HFWReactionTank310 M3HFWReactionTank410 M3M HFWSedimentationTankL3.8m*W3.8m*H3.05mTo AWCTM CaCl2 Polymer PAC M M HFWReactionTank110 M3H2SO4M To SLCTTo HFWRTFrom CDA ppt课件.15Newlvit 04/08/201215HF Treatment System FlowHFWSludge storageTankL3.8m*W3.8m*H3.05mM From CDA TO HFWCTSlurry FilterpressFrom HFWST Lorryout英文简写说明EMP：Emergency Pump SLCT：Sludge Storage Tank HFWRT：HFW Reaction Tank AWCT：AW Collection TankSLFT：Slurry Filterpress WWSUP：Wastewater Sump PumpHFWST：HFW Sedimentation Tank HFWCT： HFW Collection TankTo HFWCTppt课件.16Newlvit 04/08/201216GW Treatment System FlowAW Collection Tank 100 M3Dr-GMAWLifting Tank10 M3 From EMPFrom HFWSTFrom CSUPAir BlowerFrom ASUPFrom MMF/ACF Backwash WWFrom Reclaim BypassTo AWNTppt课件.17Newlvit 04/08/201217GW Treatment System FlowNaOH M M AWNeutrTank123 M3H2SO4M AWNeutrTank323 M3AWNeutrTank223 M3AWEffluentTank12 M3DischargeTo EMT ppt课件.18Newlvit 04/08/201218EM System FlowEmergencyTank 150 M3AW Collection Tank 100 M3HF Collection Tank 30 M3AWEffluentTank12 M3To AWCTTo HFCT ppt课件.19Newlvit 04/08/201219Waste Chemical CollectionSolvent LiftingTank 5 M3Dr H2SO4Dr H3PO4Dr SOLLorryoutppt课件.20Newlvi。