美国ASTMD电子及半导体工业用纯水水质要求.docx

项目TypeE-1TypeE-1.1TypeE-1.2TyPeE-2TyPeE-3TyPeE-4线宽(um)1.0-0.50.5-0.250.25-0.185-1>5-电阻率18.218.218.217.5120.5热源(EU/ml)0.030.030.030.25--TOC@g/L)521503001000溶解氧DO(ug/L)111---蒸发残渣（ug/L）10.50.1---微粒（um）（SEM检测）0.1—0.2100010002000.2—0.5500500l0030000.5—1.0505011000010---100000微粒（um）（检测）0.05—0.15005001000.1—0.2300300500.2—0.35050200.3—0.5202010>0.5441细菌100mlSample1111LSample110.11010000100000硅(um)总硅30.50.510501000溶解硅10.10.05离子(ug/L)NH40.10.10.05--Br0.10.050.02--Cl0.l0.050.021101000F0.10.050.03---N030.10.050.0215500N020.l0.050.02---P040.10.050.0215500S040.10.050.0215500Al0.050.020.005---Ba0.050.020.001---B0.050.020.005---Ca0.050.020.002---Cr0.050.020.002---Cu0.050.020.00212500Fe0.050.020.002---Pb0.050.020.005---Li0.050.020.003---Mg0.050.020.002---Mn0.050.020.002---K0.050.020.00212500K0.050.020.00525500Na0.050.020.005151000Sr0.050.020.001---zi0.050.020.00215500。