爱德华scrubber高处理量.ppt

ATLASProduct range overviewProduct range overviewThe￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007ATLAS range•Combustion abatement combined with wet scrubbing stages•Suitable for Etch applications•Low CoO, user friendly solution•Excellent reliability on harshest processes•PFC gas abatement capability2The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007ATLASConstructionThe￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007ATLAS LayoutAll utility connections at topAll electrics housed in front-accessible sectionTouch-sensitive colour screenInlet pipework design avoids powder & liquid trappingHydro-cyclone: self-cleaning water filtering deviceEasily accessible heat exchanger and water pumpsUse of CPVC components, large diameters minimise risk of blockageEverything housed in a single cabinetIntegral drip-trayCPVC is a FM-approved flame-retardant plastic4The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Gas pathWaterUntreated process gasCombustion by-productsDetoxified gasFuel + Air5The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007ATLASCombustion sectionThe￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Inlets•L-shaped pipe work•Avoid blockage by solid/liquid by-products•Up to 6 inlets•TMS option available•Inlet temperature control•Avoid by-products condensation7The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Combustion section•Initial gas treatment: combustion•Oxidation of deposition gases•SiH4 + O2  SiO2 + 2H2O•Reduction of clean gases (NF3, F2)•2F2 + CH4 + O2  4HF + CO2 •Anti-clogging inlet head•Inward fired combustor•Porous ceramic construction•Excellent corrosion resistance•Proven powder handling•Safe (leak-proof, cold outer wall)8The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007ATLAS InletsPneumatic actuatorsSpringsInlet Head Self Cleaning MechanismInlet nozzleCombustor150mm150mm10The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Combustor: Inward fired combustionFuel gas + AirProcess gasFlame-less, low temperature combustion800oC11The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Benefits 1: Uniform temperature•Flame-less combustion•Combustion at the wall•Heat radiation to the center•Low temperature ~ 800oC•Low NOx emissions (<10ppm)•Uniform Temperature•No hot spot, No cold spot•Combustor length of 300mm = Long residence time in a hot environment at 800°C•High DRE800oC12The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Benefit 2: Powder handling - No blockagesConstant flow of gas (Fuel+Air) across ceramic liner prevent powder deposition.Burner stays clean – No blockages800oC13The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Benefit 3: No corrosionØOnly ceramic material in contact with hot gasesØNo corrosionØGreater safetyØGreater uptime800oCCeramic gasketPorous Ceramic linerCeramic pad14The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Benefit 4: Safety•Outer wall of burner is cold (~ 40oC)•Safe to touch, no burn injury•O-rings are used in cold area only•No metal part in contact with hot gas•Viton can resist HF and HCl below 200oC•Burner is leak-proof, Burner stay leak-proof•No risk of hot gas leakage800oC15The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007ATLASWet scrubbing sectionThe￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Wet scrubbing section•C-PVC construction•Flame retardant plastic•Corrosion-resistant•High efficiency scrubbing performance•Water soluble by-products (HF, HCl…etc.)•Insoluble particles (SiO2)17The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Wet scrubbing sectionWet scrubbing sectionCyclonic de-mistingPacked TowerWater tankHeat exchangerCyclonic water filteringWater pumpsQuenchWeir18The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Wet stage – Cooling sectionQuench sectionWeir – section800oC50oC19The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Wet stage – Drain tank and packed towerDrain tank – CPVC constructionLarge diameterCounter-current packed tower (CPVC construction)20The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Drain tank•C-PVC construction•Turbulent water flow•Circulation rate: 1 volume per min.•No sedimentation of powders•Control by level detectors•Filter plate to prevent drain clogging•Easy access for quick servicing21The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Controls•PLC control•Color touch screen display•Ease of service•History log•Ethernet communication•Compatible with all CMS systems•Pump interface•Tool interface22The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Two levels of Control•Master PLC with colour touch screen display•Requests FMS to start flame.•PLC can independently isolate gas supply•Flame Management System (FMS)•Legal requirement to comply with US fire codes.•FMS assembly is approved by FM•Hardwired interlock.• 23The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007ATLAS safety interlocksHEAD TEMP.> 180 °CGAS TEMP.> 1150oCQUENCH TEMP.> 80oCDRAIN LEVEL HIGHFUEL/AIR PRESS. > +3”wgFUEL/AIR TEMP.> 150 °CN2 pressure < 3 bar(no start allowed in this condition)INLET PRESSURE > 2” wgSYSTEM WARNING output attention requiredSYSTEM ALARM immediate system shutdownFLAME DETECTORQUENCH WATER Flow < 4.5 slmO2 pressure > 12 psi(TPU and Kronis versions only)FUEL PRESSURE. < 7.5 mbarWATER LEAK DETECTOR (inside cabinet)DRAIN TANK TEMP.> 60 °CCOMBUSTOR PRESSURECabinet extraction pressure +0.4”wgINLET TEMPERATURE > 170°CWEIR TEMP.> 80oCCOMBUSTOR WALL TEMP.> 70oCPACKED TOWER WATER Flow < 8 slmWATER PRESSURE < 2 bar gauge24The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007ATLAS installed baseSince 1994The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007Inward-fired combustor installed base•ATLAS use the Inward-fired combustion technology•Expertise gained with the TPU range •Used in semiconductor fabs since 1994•Over 3000 systems installed worldwide•Major users and OEM•Intel, IBM, Ti, Micron•UMC, PSC, Winbond, AUO, CMO•Elpida, TTi, NEC, Hitachi, Sony•TECH, HNS•ST, Infineon, Atmel•SMIC•Novellus, ASM, AMAT, TEL, Kokusai, Jusung26The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007ATLAS – over 400 systems to dateATLAS – over 400 systems to date•UMCi (Singapore)•Installed since December 2006•UMC12A (Taiwan)•Installed since November 2006•Kwanjyu-nano (Korea)•Installed June 2007•Rexchip (Taiwan)•CMO (FPD – Taiwan)•Tianma(Chendu,Wuhan)•GSMC27The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007ATLAS Cost Of OperationATLAS Cost Of Operation28The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007ATLAS TPU Technical DataATLAS TPU Technical Data29The￿content￿of￿this￿presentation￿is￿confidential￿and￿should￿not￿be￿distributed￿to￿a￿third￿party￿without￿prior￿authorization￿from￿Edwards.￿©￿Edwards￿Limited￿2007。