基于紫外_可见透过谱的薄膜厚度计算研究.pdf
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null null null null null null null null null»29 »6 ùVolnull29, Nonull6 null null西 华 大 学 学 报 ( 自 然 科 学 版 )JournalofXihuaUniversity null NaturalScience null null2010 M11Nov. 2010ÓcI|: 1673null159X(2010) 06null0070null03null nulllà ° ù: 2010null06null12null nullÁ'ù:SE1 SÐÁ(50902012);¹+8¨$[ "(2009JY0087)null nullTeº:fZo(1976null), o,=,ö1ùîZ_¹9Ø TMYÐm^) Ø bEnullmai:l zhb@ cuit. edu. cn¿,null VniV ö¥¨9Øùî张海波1,康建波2,孙null 辉2,杨定宇2,朱兴华2(1.îûýñÐý©ýñÐý,¹+îû610225; 2.îûýñÐý;È/Ðý,¹+îû610225)Knull1:©k eÅ¥¨^Å!ÚÉ¥×1çB b'Óô ; öiVqoî wLШW¥ = ó",¿ wL EZE!9 7?B {9Ø Èq,¾ñ½ ? |©k; ö i1î9ب| q,ñ½9زTÐû¨N©k²TÖ z,£ü'Óî 7?¥ Èq^ µr¥ b1oM:,null VniV ö;¨; wL E;ñ½!9null nullÏms Ë|: TN304 null nullÓDSM: AResearch on theCalculation ofFilm ThicknessBased onUVnullvisibleSpectrumZHANG Hainullbo1, KANG Jiannullbo2, SUN Hui2, YANG D ingnullyu2, ZHU Xingnullhua2(1.SchoolofNetwork Engineering, ChengduUniversity of InformationTechnology, Chengdu 610225China;2.SchoolofOptoelectronicTechnology, ChengduUniversity of InformationTechnology, Chengdu 610225China)Abstract: Themeasurement and control of thickness are important steps in the deposition of highnullquality films. At present, thefilm thickness obtained byUVnullvisible spectra iswidely used as a nonnullinvasivemethod. A ccording to the inherent relationship betweenthe interference fluctuation ofUVnullV is transmission and the film thickness, a kind of softwarewas designed based on certain algorithmand fittingmethod, which can read data ofUVnullV is spectra then automatically calculate and output film thickness and refractive index.It is found that the procedure result is in good agreementwith themeasurement of surface profile, show ing considerable reliability.Keywords:UVnullvisible spectrum; film thickness; curve fitting; program designingnull nullö8¥¨^Bñ×1¥ b Å!VñÏ,³1 eÅÅ!" Ö¥¨ Bña¥S¶ =,[ £" Ö¡@B祲ÖÉ,^ !ªs;È ?¥×1$ bN, ¥;È ?És©kH,9³1©¡Å!" Ö¥¨,^çsA V¥ b.d,Úᥨ©ZE ¨Vë} N(û¨E) áíÈä©ZT[ 1, 2] b 7,®¿û¨N áíÈäN !!ÅL, ô#qÚ bÍ M ,YV©k¥,null VniV ö W¤¤" Ö¥¨4BÕ×1¥9}ZE[3, 4] b®¿Ä r," Ö¥,null VniV öÏ ÉoÈöCiVq¥loîC`,ô M#Ä oÐo!¥iVq ,É E9Ø' V¤" Ö¥¨| q©;Ð b;ÐZE©k¨í³ åÊÅ!" Ö,4BÕíå ¨_©/Zà b'Ó¿ð Ø 7?B { Èq,¾ Èq ? |¥,null Vn; ö©k i ë'{"Ö¨,vveĨ¥9ØVñ b ¨©k"Ö¨ b?EÅ!, ,null VniV ö¨ °'ÃUVnull2550,null Vns;;9©,7¨¥°¤©¨null- stepû¨N b1null 紫外null可见光谱与薄膜厚度的计算原理,null Vns;;9¿þÉs0,null Vn;¥Ê4 l, VÉç aç#²»6 ùfZo©:¿,null VniV ö¥¨9Øùînull null nulls b'Ó¨9Ø eÅ¥UV&¶2550,null Vns;;9©¥iV; ö,©¥²T°¤{È 7,¾N ¥; ö áíS¶ 190~1100 nmW,ô L= f VÊ4Ø« bm1^ b £?Å!PbI2¥,null VniV ö,?÷ѹ150 null ,é¸Ñ¹iÑ,÷nulléW ¹3 cm,3ÉHW2 h b InPbI2¥Ì{zÿ¹2null42 eV,©kHs;;9¥ áíS¶!ç¹300~ 900 nm, T¹iV wL b V[ A, Æ ;v¿500 nmª,iVq$ 9viCüA¥oîC`,By¿Ðj ðé¸W¥Ä r[5] bN,¥;iVqT^¥¨d a; l"null a| qn[#é¸| qnsÆ ;oÉnull¥f bùîVü[ 6],鸥| q¡@ Â/Zñn= [Y+ (Y2 - n2s )1/2 ]1/2 (1)Y= 2ns(TM -Tm )TMTm+ n2s + 12 (2)TÏ: TMTmsY}ViV öÏ v l E wL¥iVq, Âm1îU bm1null b?EÅ!PbI2¥,- VniV ö()# E wL(/)m2óÄ ¥Uim b;L1^°¤,V,;L255 ¥/¸ëQ ,r¸ëª QQ í ª,V b¹ b# n,;L2¥QQ ms 7Â,L=^ ]BÊ b In'Óùî¥CdS| qBîv¿2,¥/¸ësY^ b j ð,7j ð¥| qBî 1null5P·,yN;L2 QQ ÏÀµÁ3öoå> bô Ä ð Ø,iV;L¥ v´;L1;L2¥;ñµ(2nd)¹oÉ ¥ f,7 l´5;ñµ¹öoÉ f b'Ó9ØHÊ |M#¥ñiVq v´,y7 Ä )QMµ1),yNµ2nid=mnulli, 2njd= (m+ 1)nullj ( 3)TÏ:/Si aj¨ SÿM#o( v´)ÊÂ¥(oÉ a| q),m¹Ä )Q bm2nullÄ Uimô ( 3)T V[©¡d= nullinullj2(njnulli - ninullj)( 4)²T(1) ~ (4)' V9Ø¥¨| q b2null 需求分析与程序设计2null1null³ ps#; ö wL¥ Eñ½n51 ¥,null Vn; ö Ïsîµ¥oo! b Q,®¿ ou;¥ < l,N ?P¨,A¶Í[1" bN, ¤µr¥oo! ªÎ1sYoo! Éa¥ E bKª, æ¨E¥ wL。
