镀膜真空术语全集
.镀膜真空术语全集(中英文对照)5.分压真空计(分压分析器)5-1.射频质谱仪radio frequency mass spectrometer:5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer :5-3.单极质谱仪momopole mass spectrometer:5-4.双聚焦质谱仪double focusing mass spectrometer:5-5.磁偏转质谱仪magnetic deflection mass spectrometer:5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer:5-7.回旋质谱仪omegatron mass spectrometer:5-8.飞行时间质谱仪time of flightmass spectrometer:6.真空计校准6-1.标准真空计reference gauges:6-2.校准系统 system of calibration :6-3.校准系数 K calibration coefficient :6-4.压缩计法 meleod gauge method:6-5.膨胀法 expansion method:6-6.流导法 flowmethod:4. 1.真空系统 vacuum system1-1.真空机组 pump system:1-2.有油真空机组pump system used oil :1-3.无油真空机组oil free pump system1-4.连续处理真空设备 continuous treatment vacuum plant:1-5.闸门式真空系统vacuum system with an air-lock :1-6.压差真空系统differentiallypumped vacuum system:1-7.进气系统 gas admittance system:2.真空系统特性参量;.2-1.抽气装置的抽速volume flowrate of a pumping unit :2-2.抽气装置的抽气量throughput of a pumping unit :2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system:2-4.真空系统的漏气速率leak throughput of a vacuum system:2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber:2-6.极限压力 ultimate pressure:2-7.残余压力 residual pressure:2-8.残余气体谱residual gas spectrum:2-9.基础压力 base pressure:2-10.工作压力 working pressure:2-11.粗抽时间 roughing time:2-12.抽气时间 pump-down time :2-13.真空系统时间常数time constant of a vacuum system:2-14.真空系统进气时间venting time:3.真空容器3-1.真空容器;真空室vacuum chamber:3-2.封离真空装置sealed vacuum device:3-3.真空钟罩 vacuum bell jar:3-4.真空容器底板vacuum base plate:3-5.真空岐管 vacuum manifold :3-6.前级真空容器(贮气罐)backing reservoir:3-7.真空保护层outer chamber:3-8.真空闸室 vacuum air lock:3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor:4.真空封接和真空引入线4-1.永久性真空封接permanent seal :;.4.2. 玻璃 分级过渡封接graded seal :4-3.压缩玻璃金属封接*pressionglass -to-metal seal:4-4.匹配式玻璃金属封接matched glass-to-metal seal:4-5.陶瓷金属封接ceramic-to-metal seal:4-6.半永久性真空封接semi-permanent seal :4-7.可拆卸的真空封接demountable joint :4-8.液体真空封接liquidseal4-9.熔融金属真空封接molten metal seal:4-10.研磨面搭接封接ground and lapped seal:4-11.真空法兰连接vacuum flange connection :4-12.真空密封垫vacuum-tight gasket:4-13.真空密封圈ring gasket:4-14.真空平密封垫flat gasket:4-15.真空引入线feedthrough leadthrough:4-16.真空轴密封shaft seal:4-17.真空窗 vacuum window :4-18.观察窗 viewing window :5.真空阀门5-1.真空阀门的特性characteristic of vacuum valves: .真空阀门的流导 conductance of vacuum valves: .真空阀门的阀座漏气率 leak rate of the vacuum seat:5-2.真空调节阀regulating valve :5-3.微调阀micro-adjustable valve:5-4.充气阀 charge valve:5-5.进气阀 gas admittance valve :5-6.真空截止阀break valve:5-7.前级真空阀backing valve :;.5-8.旁通阀by-pass valve:5-9.主真空阀 main vacuum valve:5-10.低真空阀 low vacuum valve:5-11.高真空阀 high vacuum valve :5-12.超高真空阀; UHV 阀 ultra-high vacuum valve :5-13.手动阀 manually operated valve :5-14.气动阀 pneumatically operated valve:5-15.电磁阀 electromagnetically operated valve:5-16.电动阀 valve withelectricallymotorized operation:5-17.挡板阀 baffle valve :5-18.翻板阀 flap valve:5-19.插板阀 gate valve :5-20.蝶阀 butterflyvalve :6.真空管路6-1.粗抽管路 roughing line:6-2.前级真空管路backing line :6-3.旁通管路; By-Pass 管路by-pass line :6-4.抽气封口接头pumping stem:6-5.真空限流件limitingconductance:6-6.过滤器 filter :5. 1.一般术语1-1 真空镀膜 vacuum coating:1-2 基片 substrate:1-3 试验基片 testing substrate:1-4 镀膜材料 coating material:1-5 蒸发材料 evaporation material:1-6 溅射材料 sputtering material:;.1-7 膜层材料 (膜层 材质)filmmaterial:1-8 蒸发速率 evaporation rate:1-9 溅射速率 sputtering rate:1-10 沉积速率 deposition rate:1-11 镀膜角度 coating angle:2.工艺2-1 真空蒸膜 vacuum evaporation coating:(1).同时蒸发 simultaneous evaporation:(2).蒸发场蒸发evaporation field evaporation:(3).反应性真空蒸发reactive vacuum evaporation:(4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator:(5).直接加热的蒸发direct heating evaporation:(6).感应加热蒸发induced heating evaporation:(7). 电子束蒸发 electron beam evaporation:.激光束蒸发laser beam evaporation:(9).间接加热的蒸发indirect heating evaporation:(10).闪蒸 flash evaportion:2-2 真空溅射 vacuum sputtering:(1).反应性真空溅射reactive vacuum sputtering :(2).偏压溅射 bias sputtering:(3).直流二级溅射direct current diode sputtering:(4).非对称性交流溅射asymmtric alternate current sputtering:(5).高频二极溅射high frequency diode sputter