利用晶体生长软件femag对蓝宝石晶体生长的仿真计算方法
34页1、CONFIDENTIAL,利用晶体生长软件FEMAG 对蓝宝石晶体生长仿真模拟方法,FEMAGSoft S.A., Belgium A SPIN-OFF company from Universite catholique de Louvain Belgium Professor F. Dupret,CONFIDENTIAL,General introduction Sapphire Growth,Content,CONFIDENTIAL,Introduction,For more than 25 years, FEMAGSoft develops simulation software dedicated to the research and development of optimal crystal growth processes. 1984 First research on Germanium growth in University of Louvain. Prof. Franois Dupret 1989 First research on Silicon growt
2、h in University of Louvain. 1992 First collaborations with major IC companies. Development of defect-free silicon wafer production. Today, more than 35 patents are referencing FEMAG Software 2003 FEMAGSoft S.A., spin-off from University of Louvain. 2006 Collaboratrion with major Solar companies. Development of low-cost and low-oxygen content processes. 2009 Large investment for a new software framework 2010 Release of Software application for Sapphire ingot production.,CONFIDENTIAL,Czochralski p
3、rocess,CONFIDENTIAL,Directional Solidification System,CONFIDENTIAL,Floating Zone Process,CONFIDENTIAL,Sapphire Growth by CZ and kyropoulos,CONFIDENTIAL,Sapphire growth by HEM,CONFIDENTIAL,What are FEMAG software?,Process-dedicated simulation tools, adapted to your own processes and able to solve your problems. Global All the furnace components are considered. All the heat transfer mode are considered (radiation transfer, heat conduction, melt and gas convection) Induction and ohmic heating Time
4、Dependent,CONFIDENTIAL,Process-dedicated tools,FEMAG-CZ : Czochralski FEMAG-FZ : Floating Zone FEMAG-VB : Vertical Bridgman FEMAG-CZ/OX : Czochralski for Sapphire FEMAG-KY : Kyropoulos FEMAG-DS : Directional Solidification FEMAG-HEM : Heat Exchange Method,Gain of time. Process mastering Accurate and right to the point,CONFIDENTIAL,Platform oriented,FRAMEWORK : FEMAG3,RADIATION,CONVECTION,MESH,GEOMETRY,CONDUCTION,FEMAG-CZ,FEMAG-HEM,FEMAG-DS,FEMAG-KYROPOULOS,FEMAG3 NEW 2011 Very accurate : Finite
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