外文翻译--THE INSTALLATION OF A 300 TO 600 GPMSEMICONDUCTOR HIGH-PURITY WATER 英文版SYSTEM

翻译原文THE INSTALLATION OF A 300 TO 600 GPMSEMICONDUCTOR HIGH-PURITY WATER SYSTEM 26 ULTRAPURE WATER® SEPTEMBER 1999-UP160726The life of a high-purily water treatment project may be compared to rolling a boulder down a dome-shaped hill(1). The project gets rolling with a fairly small nudge. Once it is rolling, however,it takes a great deal of effort (time and money) to change the direction or go back up the hill. The project to esign,build, install, and commission the “E” high-purity water system at VLSI Technologys San Antonio, Texas, manufacturing site followed this model. Now that we are at the bottom of the hill with a functional system, we will take a look back to see the major decisions and players that made the new system successful. Every custom water system carries a “flavor” from the owner. VLSI Technology Inc. makes custom and semi-custom integrated circuits (ICs) primarily for the digital communications and graphics industries. VLSI currently has one wafer fabrication plant for production quantities of ICs. This plant in San Antonio has approximately 60,000 square feet of Class 1/Class 100 cleanroom space making a variety of products with minimum line sizes of 0.8 micron (m) to 0.2 m on 150-millimeter (mm) (6 inch) wafers. The plant is currently converting to 200-mm (8 inch) wafers. VLSI had 1998 revenue from continuing operations of $548 million and employs about 2,200 people worldwide of which 600 to 700work in San Antonio. The Start of the Project.In the summer of 1997, VLSI initiated a project to expand the manufacturing cleanroom by roughly 15,000 square feet. This new space holds chemical mechanical polishing units (CMP, a process required for line widths of 0.35 m and smaller) and other fab equipment. The “E” high-purity water system was built to supply water to the fab to support the extra demand from the CMP process and the conversion to 200-mm wafers. VLSI-San Antonio had four existing water systems operating in parallel with a combined capacity of 600 gallons per minute (gpm). We identified the need for a high-purity water system supplying 300 gpm, but recognized that previous estimating efforts had fallen short by 10% to 25% of eventual demand. We also saw that the water quality from the existing systems was adequate for current technologies, but was starting to cause problems for the manufacturing organization usually when the systems were not working in “normal” mode. System OverviewThe existing water systems (Trains Athrough D). Industrial Design Corp. designed the existing systems (A through D). The “A” system was a turnkey project by Aqua-Media built in 1987. The other systems were manufactured by Ionics Pure Solutions (Tempe, Ariz.) in 1991, 1995, and 1996. Dynamic Systems purchased and installed these systems as mechanical contractors. The “A” though “D” systems all had very similar schematics with these characteristics: multimedia and activated carbon beds for pretreatment; polypropylene microfilters; antiscalant injection; single-pass reverse osmosis (RO); twostage tower vacuum degasifiers; in-situregeneration mixed beds; low pressure 185-nanometer (nm) and 254-nm ultraviolet (UV) lamps; polypropylene UF prefilters; and polysulfone ultrafilters as the final filters. VLSI also had developed a paradigm in terms of control, redundancy, parallel operation, and system sterilization. This he life of a high-purity water treatment project may be compared to roll- ISSN:0747-8291. COPYRIGHT (C) Tall Oaks Publishing,Inc. Reproduction in whole, or in part, including by electronic means, without permission of publisher is prohibited. Those registered with the Copyright Clearance Center (CCC) may photocopy this article for a flat fee of $1.50 per copy.paradigm included the following characteristics: 1. High-purity water systems operate inparallel, except for unusual maintenance or emergency conditions. 2. The systems are designed for a maximum flowrate, and do not have the ability to be expanded. 3. All unit operations in the fab must have redundant equipment on separate utility systems. For example, the sulfuric strip process needs to haveone wet station served by “B” and one served by “D.” 4. Pumps, primary mixed beds, and other high maintenance operations have redundant equipment installed side by side. 5. Polishing mixed beds and vacuum degasifiers are not redundant. 6. Various resin vendors can be used in different systems depending on who offers the best quality, service, and price at the time of purchase. 7. Sterilization is by ozone on an annual basis unless bacteria counts indicate a problem. 8. VLSI relies on off-site laboratories for water analysis beyond the on-line instruments. 9. All systems are to have local controlby an independent programmable logic controller (PLC) reporting up to a facilities building management system. Programming is considered to be of very high importance and is only entrusted to known good programmers. Even th